✦ LIBER ✦
Construction of magnetron sputtering sources for producing films with good thickness uniformity: J Karányi, G Vágó and L Backhausz, MEV Microelectronic Co, Budapest, Hungary
- Book ID
- 103472298
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 127 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0042-207X
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