Conformal Polymeric Thin Films by Low-Temperature Rapid Initiated Chemical Vapor Deposition (iCVD) Using tert-Butyl Peroxybenzoate as an Initiator

✍ Scribed by Xu, Jingjing; Gleason, Karen K.

• Book ID: 115448391
• Publisher: American Chemical Society
• Year: 2011
• Tongue: English
• Weight: 822 KB
• Volume: 3
• Category: Article
• ISSN: 1944-8244
• DOI: 10.1021/am200322k