Conformal hydrophobic coatings prepared using atomic layer deposition seed layers and non-chlorinated hydrophobic precursors

✍ Scribed by Herrmann, Cari F; DelRio, Frank W; Bright, Victor M; George, Steven M

• Book ID: 120997683
• Publisher: Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 806 KB
• Volume: 15
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/15/5/013