Conformal growth and characterization of hafnium silicate thin film by MOCVD using HTB (hafnium tertra-tert-butoxide) and TDEAS (tetrakis-diethylamino silane)

✍ Scribed by Jaehyun Kim; Kijung Yong

• Book ID: 106397526
• Publisher: Springer US
• Year: 2006
• Tongue: English
• Weight: 333 KB
• Volume: 18
• Category: Article
• ISSN: 0957-4522
• DOI: 10.1007/s10854-006-9050-2