Conformal Deposition and Gap-Filling of Copper into Ultranarrow Patterns by Supercritical Fluid Deposition

✍ Scribed by Momose, Takeshi; Sugiyama, Masakazu; Kondoh, Eiichi; Shimogaki, Yukihiro

• Book ID: 124160039
• Publisher: Institute of Pure and Applied Physics
• Year: 2008
• Tongue: English
• Weight: 651 KB
• Volume: 1
• Category: Article
• ISSN: 1882-0778
• DOI: 10.1143/APEX.1.097002