Microlens arrays for confocal microscopy
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H.J. Tiziani; R. Achi; R.N. KrΓ€mer; T. Hessler; M.T. Gale; M. Rossi; R.E. Kunz
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Article
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1997
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Elsevier Science
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English
β 869 KB
Replica arrays were produced by ultraviolet embossing and hot embossing techniques. Fabricated arrays with a numerical aperture of 0.28 exhibited near diffraction limited performance and a focal length standard deviation of 120 nm in a nominal value of 250 pm. The technique developed represents a co