✦ LIBER ✦
Conditions for successful low-temperature growth of hydrogenated amorphous silicon film from silyl radicals conformed to layer-growth mode
✍ Scribed by Mitsuo Kawasaki; Hideo Suzuki; Yusuke Kawaguchi
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 442 KB
- Volume
- 79-80
- Category
- Article
- ISSN
- 0169-4332
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