✦ LIBER ✦
Condensation trap for protecting vacuum systems in plasma and ionic jet etching of aluminum
✍ Scribed by N. N. Tarasov; E. V. Leonov; D. O. Litovka; S. A. Denisova
- Publisher
- Springer
- Year
- 1992
- Tongue
- English
- Weight
- 238 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0009-2355
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