✦ LIBER ✦
Concentration profile of phosphorus implanted in silicon: P Kotas and F Cerny, Chem Listy, 67 (9), 1973, 977–781 (in Czech).
- Publisher
- Elsevier Science
- Year
- 1974
- Tongue
- English
- Weight
- 158 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0042-207X
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