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Concentration changes of Pt and Si in a Pt/poly-Si thin layer system between 750 and 1000°C

✍ Scribed by G.L.P. Berning; C.W. Louw


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
299 KB
Volume
31
Category
Article
ISSN
0169-4332

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