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Computer simulation of the impurity distribution over the thickness of a film during growth out of the gas phase

โœ Scribed by L. N. Aleksandrov; A. N. Kogan; V. I. D'yakonova

Book ID
104958085
Publisher
Springer US
Year
1983
Tongue
English
Weight
407 KB
Volume
45
Category
Article
ISSN
1573-871X

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