✦ LIBER ✦
Computer simulation of the effect of disordered surface layers on the reflection of phosphorus ions from silicon (100) crystalline targets in grazing incidence ion implantation
✍ Scribed by Kenjiro Oura; Hiroaki Ugawa; Fumiya Shoji; Teruo Hanawa
- Book ID
- 113280127
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 327 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0168-583X
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