✦ LIBER ✦
Computer simulation of the development of dish-shaped deepenings by orientation-dependent etching of {100} silicon
✍ Scribed by D. Dietrich; J. Frühauf
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 793 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0924-4247
No coin nor oath required. For personal study only.