✦ LIBER ✦
Computer simulation of pattern profiles through physical etching with shadow, trenching, and redeposition
✍ Scribed by I.W. Rangelow; P. Thoren; R. Kissing
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 857 KB
- Volume
- 3
- Category
- Article
- ISSN
- 0167-9317
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