✦ LIBER ✦
Computer simulation of ion implantation range profiles in single crystals materials: R S Kalsi and R P Webb, Electrical and Electronic Engineering Department, University of Surrey, Guildford, Surrey GU2 5XH, UK
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 129 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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