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Computer Simulation of Impurity Diffusion in Semiconductors by the Monte Carlo Method

✍ Scribed by Akiyama, A.; Hosoi, T.; Ishihara, I.; Matsumoto, S.; Niimi, T.

Book ID: 118698217
Publisher: IEEE
Year: 1987
Tongue: English
Weight: 546 KB
Volume: 6
Category: Article
ISSN: 0278-0070
DOI: 10.1109/tcad.1987.1270262

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