Computer simulation of emission of neutrals from liquid metal ion source

✍ Scribed by T Tzvetkov; N Drandarov

• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 452 KB
• Volume: 51
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(98)00141-9

✦ Synopsis

Emission from the liquid metal ion source under the strong electric fields is complex as it includes emission of ions, neutral atoms and different types of ionized or neutral clusters. It is assumed that the neutral stream includes up to 60% of the mass loss. To monitor the operation of the liquid metal ion source one needs to understand the emission of neutral particles. The motion of neutral particles in strong electric fields was derived from field calculations using the spherical coordinates with increasing mesh (SCWIM) and the finite difference formulae described in the literature. The trajectories of Ga + ions and neutrals were calculated and results for their respective energies presented.