Computer simulation of blistering in multilayer mirrors for EUV lithography

✍ Scribed by A. L. Bondareva; G. I. Zmievskaya

• Book ID: 110203250
• Publisher: Pleiades Publishing
• Year: 2010
• Tongue: English
• Weight: 303 KB
• Volume: 4
• Category: Article
• ISSN: 1027-4510
• DOI: 10.1134/s1027451010030201