Computer numerically controlled plasma chemical vaporization machining with a pipe electrode for optical fabrication

✍ Scribed by Takino, Hideo ;Shibata, Norio ;Itoh, Hiroshi ;Kobayashi, Teruki ;Tanaka, Hiroaki ;Ebi, Masami ;Yamamura, Kazuya ;Sano, Yasuhisa ;Mori, Yuzo

• Book ID: 115347333
• Publisher: The Optical Society
• Year: 1998
• Tongue: English
• Weight: 446 KB
• Volume: 37
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.37.005198