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Computer controlled electronics for surface analysis

Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
100 KB
Volume
34
Category
Article
ISSN
0042-207X

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Granite surface plates are traditionally finished by hand lapping, which is time consuming, strenuous, and costly. Surface quality and accuracies of such plates depend largely on the experience and skill level of the operator. In this study, a computer-controlled system is developed for ultraprecisi