Computer control of the manufacture of electron beam processed microelectronic modules : G. S. Evans and S. Mather-Lees, Radio Electron. Engr, February (1967), p. 113

• Publisher: Elsevier Science
• Year: 1968
• Tongue: English
• Weight: 97 KB
• Volume: 7
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(68)90302-8