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Computational methods for design and control of MEMS micromanipulator arrays

✍ Scribed by Bohringer, K.F.; Donald, B.R.; MacDonald, N.C.; Kovacs, G.T.A.; Suh, J.W.

Book ID: 121321648
Publisher: IEEE
Year: 1997
Tongue: English
Weight: 345 KB
Volume: 4
Category: Article
ISSN: 1070-9924
DOI: 10.1109/99.590852

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