✦ LIBER ✦
Comprehensive study of the conditions for obtaining hydrogenated amorphous erbium- and oxygen-doped silicon suboxide films,a-SiOx:H 〈Er,O〉, by dc-magnetron deposition
✍ Scribed by Yu. K. Undalov; E. I. Terukov; O. B. Gusev; V. M. Lebedev; I. N. Trapeznikova
- Book ID
- 111445103
- Publisher
- Springer
- Year
- 2011
- Tongue
- English
- Weight
- 281 KB
- Volume
- 45
- Category
- Article
- ISSN
- 1063-7826
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