Compound semiconductor research at the University of Washington in Seattle, Washington

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 501 KB
• Volume: 9
• Category: Article
• ISSN: 0961-1290
• DOI: 10.1016/s0961-1290(96)80126-8

✦ Synopsis

The electronic materials program at the University of Washington is a research collaboration involving three departments: Chemical Engineering, Electrical Engineering, and Materials Science and Engineering. The program addresses current important issues in three areas: superlattices and artificially structured materials, epitaxial deposition of electronic materials on dissimilar substrates, and use of surface chemistry and atomic layer growth to achieve epitaxial deposition at reduced temperatures. A key enabling technology for these research areas is the development and use of non-invasive process monitoring and real-time control.

Research in these areas is leading to new concepts in materials processing and epitaxial growth technologies for the semiconductor industry.