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Composition-control of magnetron-sputter-deposited (Ba[sub x]Sr[sub 1âx])Ti[sub 1+y]O[sub 3+z] thin films for voltage tunable devices

✍ Scribed by Im, Jaemo; Auciello, O.; Baumann, P. K.; Streiffer, S. K.; Kaufman, D. Y.; Krauss, A. R.

Book ID: 120803385
Publisher: American Institute of Physics
Year: 2000
Tongue: English
Weight: 270 KB
Volume: 76
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.125839

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