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Composition changes in sputter deposition of Y-Ba-Cu-O films

โœ Scribed by Hoshi, Y.; Naoe, M.


Book ID
114548667
Publisher
IEEE
Year
1989
Tongue
English
Weight
287 KB
Volume
25
Category
Article
ISSN
0018-9464

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Composition variations in pulsed-laser-d
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The composition of pulsed-ultraviolet-laser-deposited Y-Ba-Cu-O films was examined as a function of position across the substrate, laser fiuence, laser spot size, substrate temperature, target conditioning, oxygen pressure and target-substrate distance. Laser fluence, laser spot size, and substrate