Composition changes in N2+ bombarded Ti/Si bilayers and multilayers: interplay between random and chemically guided effects

✍ Scribed by Marco Bonelli; Roger Kelly; Antonio Miotello; Lucia Calliari

• Book ID: 114168752
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 508 KB
• Volume: 127-128
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(96)00874-9