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Composition and structure characterization of aluminum after laser ablation

✍ Scribed by I. Balchev; N. Minkovski; Ts. Marinova; M. Shipochka; N. Sabotinov

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
929 KB
Volume
135
Category
Article
ISSN
0921-5107

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The structure and morphology of chromium disilicide (CrSi 2 ) nanometric films grown on h1 0 0i silicon substrates both at room temperature (RT) and at 740 K by pulsed laser ablation are reported. A pure CrSi 2 crystal target was ablated with a KrF excimer laser in vacuum ($3 Γ‚ 10 Γ€5 Pa). Morphologi