Composition and stress state of thin films deposited by ion beam sputtering : R. N. Castellano. Vacuum 27, (3) 109 (1977)

• Publisher: Elsevier Science
• Year: 1977
• Tongue: English
• Weight: 124 KB
• Volume: 16
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(77)90604-7