Composition and properties of unhydrogenated amorphous silicon produced by sputtering in argon or neon gas

✍ Scribed by Y Zaka; SA Abo-Namous; D Crumpton; RW Fane

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 422 KB
• Volume: 34
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(84)90181-7