Composition and formation mechanism of zirconium oxynitride films produced by reactive direct current magnetron sputtering

✍ Scribed by Ngaruiya, J. M. ;Kappertz, O. ;Liesch, C. ;M�ller, P. ;Dronskowski, R. ;Wuttig, M.

• Publisher: John Wiley and Sons
• Year: 2004
• Tongue: English
• Weight: 248 KB
• Volume: 201
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.200306774