Safety in thin film semiconductor deposi
โ
R.G. Wolfson; S.M. Vernon
๐
Article
๐
1987
๐
Elsevier Science
โ 503 KB
Special safety precautions are required in thin film photovoltaics manufacture because of the hazardous nature of the source gases used for deposition. Most of these gases are pyrophoric or flammable and dangerously unstable in air but it is the toxicity of some that causes the greatest concern. The