Compliant substrates: A comparative study of the relaxation mechanisms of strained films bonded to high and low viscosity oxides

A comparative study of the photoluminesc

A comparative study of the photoluminescence and conduction mechanisms of low temperature pulsed laser deposited and atomic layer deposited zinc oxide thin films

✍ Kuo, Fang Ling ;Lin, Ming-Te ;Mensah, Benedict A. ;Scharf, Thomas W. ;Shepherd, 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 252 KB

## Abstract Zinc oxide (ZnO) thin films were synthesized by pulsed laser deposition (PLD) and atomic layer deposition (ALD) at 100 °C on glass, and their structural, electrical, and optical properties were compared before and after 300 °C post‐deposition annealing in argon, vacuum, and air. The roo