Complex Boron Redistribution in P+ Doped-polysilicon / Nitrogen Doped Silicon Bi-layers during Activation Annealing

✍ Scribed by Abadli, S.; Mansour, F.; Perrera, E. Bedel

• Book ID: 125825992
• Publisher: Elsevier
• Year: 2014
• Tongue: English
• Weight: 459 KB
• Volume: 55
• Category: Article
• ISSN: 1875-3892
• DOI: 10.1016/j.phpro.2014.07.001