Complete x-ray lithography processing of an 8-level 0.4 micron CMOS test device

✍ Scribed by P. Staudt-Fischbach; W. Windbracke; H. Bernt; G. Zwicker; D. Friedrich; H.-J. Schliwinski; P. Lange; P. Hemicker; H.-L. Huber; U. Scheunemann; K. Simon

• Book ID: 103598545
• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 242 KB
• Volume: 17
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(92)90031-l