✦ LIBER ✦
Complete 3D UV microfabrication technology on strongly sloping topography substrates using epoxy photoresist SU-8
✍ Scribed by R. Engelke; G. Engelmann; G. Gruetzner; M. Heinrich; M. Kubenz; H. Mischke
- Book ID
- 113797658
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 526 KB
- Volume
- 73-74
- Category
- Article
- ISSN
- 0167-9317
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