✦ LIBER ✦
Competition between tensile and compressive stress mechanisms during Volmer-Weber growth of aluminum nitride films
✍ Scribed by Sheldon, Brian W.; Rajamani, Ashok; Bhandari, Abhinav; Chason, Eric; Hong, S. K.; Beresford, R.
- Book ID
- 120929761
- Publisher
- American Institute of Physics
- Year
- 2005
- Tongue
- English
- Weight
- 694 KB
- Volume
- 98
- Category
- Article
- ISSN
- 0021-8979
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