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Competing Roughening Mechanisms in Strained Heteroepitaxy: A Fast Kinetic Monte Carlo Study

✍ Scribed by Lam, Chi-Hang; Lee, Chun-Kin; Sander, Leonard M.


Book ID
118002313
Publisher
The American Physical Society
Year
2002
Tongue
English
Weight
164 KB
Volume
89
Category
Article
ISSN
0031-9007

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The (100) heteroepitaxial growth of lattice-mismatched semiconductors is simulated by associating the Monte Carlo technique and the valence force field approximation used for the strain energy calculations. It is shown that V-shaped defects showing ( 111 ) facets are formed in the early stages of th