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Compensation uniformity of InP:Fe as probed by electron paramagnetic resonance

✍ Scribed by B. Boudart; B. Meyer; C. Schwab; R. Coquille; M. Gauneau

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
300 KB
Volume
9
Category
Article
ISSN
0921-5107

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✦ Synopsis

The distributions of the paramagnetic neutral and total chemical iron concentrations were measured across a wafer cut from an InP:Fe ingot grown by conventional melt growth. The corresponding residual donor and deep acceptor occupancy ratio distributions were deduced. They are compared with the radial variation of the etch pit density.

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