Comparison of Two Methods of Interpretation of LangmuirProbe Data for an Inductively Coupled Oxygen Plasma

✍ Scribed by T. H. Chung; Y. M. Shin; D. C. Seo

• Publisher: John Wiley and Sons
• Year: 2006
• Tongue: English
• Weight: 163 KB
• Volume: 46
• Category: Article
• ISSN: 0005-8025
• DOI: 10.1002/ctpp.200610013