✦ LIBER ✦
Comparison of the curvature homogeneity and dynamic behaviour of framed and frameless electrostatic X/Y scanning micromirrors
✍ Scribed by Bauer, R.; Brown, G.; Uttamchandani, D.
- Book ID
- 114461583
- Publisher
- The Institution of Engineering and Technology
- Year
- 2011
- Tongue
- English
- Weight
- 397 KB
- Volume
- 6
- Category
- Article
- ISSN
- 1750-0443
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