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Comparison of sputtering and evaporation: S Schiller et al, Exper Tech Phys, 18 (1–2), 1970, 119–134 (in German)

Publisher: Elsevier Science
Year: 1971
Tongue: English
Weight: 172 KB
Volume: 21
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(71)90142-4

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