✦ LIBER ✦
Comparison of SiOx and polyimide as a dielectric layer on stainless steel in thin-film pressure sensor manufacture
✍ Scribed by T. Bravo; A. Tersalvi; A. Tosi
- Book ID
- 108028100
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 410 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0924-4247
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