✦ LIBER ✦
Comparison of radio frequency physical vapor deposition target material used for LaOx cap layer deposition in 32 nm NMOSFETs
✍ Scribed by S. Baudot; P. Caubet; M. Grégoire; R.A. Bianchi; R. Pantel; S. Zoll; M. Gros-Jean; R. Boujamaa; P. Normandon; C. Leroux; G. Ghibaudo
- Book ID
- 104052692
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 527 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
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