✦ LIBER ✦
Comparison of quartz and silicon as a master mold substrate for patterned media UV-NIL replica process
✍ Scribed by Morihisa Hoga; Kimio Itoh; Mikio Ishikawa; Naoko Kuwahara; Masaharu Fukuda; Nobuhito Toyama; Syuhei Kurokawa; Toshiro Doi
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 540 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
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