✦ LIBER ✦
Comparison of measured and calculated dose for plasma source ion implantation into 3-D objects
✍ Scribed by S. Mändl; N.P. Barradas; J. Brutscher; R. Günzel; W. Möller
- Book ID
- 114169079
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 425 KB
- Volume
- 127-128
- Category
- Article
- ISSN
- 0168-583X
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