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Comparison of Ion Irradiation Effects in Silicon-Based Preceramic Thin Films

✍ Scribed by Jean C. Pivin; Paolo Colombo; Gian D. Sorarù

Book ID: 110828146
Publisher: John Wiley and Sons
Year: 2004
Tongue: English
Weight: 117 KB
Volume: 83
Category: Article
ISSN: 0002-7820
DOI: 10.1111/j.1151-2916.2000.tb01264.x

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