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Comparison of implantation and diffusion behavior of Ti, Sb and N in ion-implanted single crystal and polycrystalline ZnO: A SIMS study
✍ Scribed by J. Lee; J. Metson; P.J. Evans; U. Pal; D. Bhattacharyya
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 741 KB
- Volume
- 256
- Category
- Article
- ISSN
- 0169-4332
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