✦ LIBER ✦
Comparison of I-V, CV, and chemical data for quality control studies of SiOxNy films on Si: G. D. O'Clock, Jr, M. W. Huck, M. S. Peters, M. J. Turner, B. A. Carlson and W. Katz. IEEE Trans. Semicond. Manufact. 1(4), 133 (November 1988)
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 142 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0026-2714
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