✦ LIBER ✦
Comparison of gas-phase reactions in low-temperature growth of Si films by photochemical vapor deposition and the hot wire cell method
✍ Scribed by Katsuya Abe; Takeshi Tsushima; Mitsuru Ichikawa; Akira Yamada; Makoto Konagai
- Book ID
- 117150280
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 151 KB
- Volume
- 266-269
- Category
- Article
- ISSN
- 0022-3093
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